Nikon Corporation (Nikon), a Japanese optics and photographic equipment manufacturer, has launched the NEXIV VMF-K Series, a next-generation video measuring system designed to meet the increasing semiconductor and electronic component inspection demands. Building upon the success of the VMZ-K Series, the NEXIV VMF-K Series offers significant benefits to a wide range of sectors in addition to semiconductor manufacturing, including advanced packaging, substrate production, wafer inspection, and probe card inspection.
As semiconductors become smaller and more integrated, inspection processes are increasingly crucial for quality maintenance. The NEXIV VMF-K Series addresses this challenge by providing stable measurements of micron-level dimensions while significantly improving throughput, thereby supporting stringent quality control in semiconductor device manufacturing. The new NEXIV VMF-K Series consists of the VMF-K3040, which replaces the VMZ-K3040, and the VMF-K6555, which replaces the VMZ-K6555.
A key benefit of the NEXIV VMF-K Series is enhanced measurement throughput — the VMF-K Series achieves approximately 1.5-times higher measurement throughput compared to the previous VMZ-K model (according to Nikon’s standard measuring conditions), significantly reducing measurement time and boosting productivity.
Improved light sourceIt also has advanced optics, in the form of a confocal optical system, which enables simultaneous 2-D and height measurement within the field of view, achieving significantly higher throughput compared to height measurement using only bright-field images. It also features an improved light source — the confocal light source has been changed from a xenon lamp to an LED, increasing lifespan from 3,000 hours to 30,000 hours. This enhancement improves operational efficiency and reduces the need for lamp replacements.
The series now includes a standardised 45-times objective lens model, supporting advanced semiconductor measurement demands for even finer measurements and the VMF-K Series meets industry safety standards for semiconductor manufacturing equipment when installed appropriately according to SEMI S2/S8 guidelines. The series offers the ability to display the remaining time during measurement. The NEXIV VMF-K Series alsoo features a sleek new factory design with black and silver tones.
Nikon said: “We are delighted to introduce the NEXIV VMF-K Series, an industry-leading solution that addresses the growing needs for high-speed, finer measurement in semiconductor and electronic component manufacturing. By significantly improving measurement throughput and maintaining high accuracy, our new system empowers manufacturers to enhance their quality control processes and accelerate product development in the face of increasing miniaturisation and integration of semiconductor devices.”