Micro‑Epsilon has expanded its portfolio of precision measurement technology with the introduction of a new high‑temperature series of confocal chromatic distance and thickness sensors. The latest sensors, designed for demanding industrial environments, can operate at temperatures up to 200 °C and are also suitable for use in ultra‑high vacuum systems and clean rooms.
The new confocalDT IFS2047‑xHT/VAC sensors feature a compact and robust stainless‑steel construction, making them suitable for installations where space is at a premium. For applications requiring even tighter integration, an optional 90‑degree beam path configuration allows the installation depth to be reduced further and offers more flexibility when mounting the sensor in restricted machine layouts.
The HT versions are designed for clean room and UHV applications, aided by a passive component design that emits no heat radiation into the surrounding environment. An adhesive‑free construction helps minimise outgassing, enabling use in sensitive industries such as electronics, semiconductor production, glass processing, medical technology and precision machine building.
The sensors are available with measuring ranges of 0.8 mm, 2 mm and 4 mm, and can be used for high‑precision displacement, distance and thickness measurement on both highly reflective and diffuse surfaces. Their performance characteristics include excellent linearity, with values down to ±0.18 µm for distance measurements and ±0.36 µm for thickness measurements, as well as resolutions as fine as 6 nm. Thermal stability is quoted at better than 0.005 % FSO/K, ensuring repeatable results even when ambient temperatures fluctuate.
All sensors in the confocalDT range are compatible with Micro‑Epsilon’s IFC confocal controllers and associated vacuum accessories. This allows measuring rates of up to 30 kHz, supporting rapid data acquisition and stable process monitoring in high‑speed production environments.
Glenn Wedgbrow, business development manager at Micro‑Epsilon UK, said: “The new confocal chromatic high temperature sensors set a new benchmark in distance and thickness measurements in challenging environments. For the first time, the Micro-Epsilon portfolio includes optical sensors that can withstand temperatures up to 200 °C, without the need for additional cooling and with maximum accuracy.”