Measurement tasks in a vacuum place the highest demands on the sensor technology used. The lower the desired pressure, the higher the demands on the materials in the vacuum. High and ultra-high vacuums (UHV) place particularly high demands on the components used and therefore also on the measurement technology. This is where high precision measurement technology from
Micro-Epsilon comes into its own: the sensors are reliable, contactless, stable and provide accurate measurement data in numerous vacuum classes – up to ultra-high vacuums. Depending on the requirements, the sensors can be configured for specific applications and optimally adapted to the respective conditions.
In industries such as semiconductor production, optics and aviation, measurements in vacuum conditions are part of everyday life, but at the same time, they place the highest demands on sensor technology. Micro-Epsilon offers both catalogue sensors and specially developed sensors that work reliably and highly accurately under extreme conditions. Due to their adapted materials and optimised design, the sensors function either directly in a vacuum or measure from the outside through vacuum windows.
Depending on the application, optical, inductive, capacitive or interferometric sensors are used. Laser displacement sensors of the optoNCDT series from Micro-Epsilon are ideal for distance measurement in processes such as laser welding and additive manufacturing. For nanometre-precision thickness measurements on semiconductor wafers or displays, Micro-Epsilon’s confocalDT series of confocal chromatic sensors are the preferred choice.
Absolute interferometers from Micro-Epsilon provide high precision distance and thickness measurements in semiconductor manufacturing. Inductive eddy current sensors from the induSENSOR series, capaNCDT capacitive sensors for displacement, distance and position measurement, as well as mainSENSOR magneto-inductive displacement sensors, offer additional solutions for demanding vacuum applications, for example, in the aerospace industry.
All sensors from Micro-Epsilon are manufactured under the strictest specifications and regularly checked (e.g. using TENAX sampling and particle probes). Due to their compact designs, integrated controllers and intelligent interfaces, the sensors can be installed quickly and integrated easily into existing systems. Micro-Epsilon offers the appropriate measurement technology for every vacuum application – individually tailored and ready for immediate use. All vacuum sensors from Micro-Epsilon are manufactured in an ISO 6 class clean room.